Energy Dispersive (EDS/EDX) X-RAY Spectroscopy

The technique used in combination on scanning electron microscopy (SEM) through chemical microanalysis is Energy Dispersive X-Ray Spectroscopy (EDS or EDX). The X-ray emitted by this technique from the sample during the shelling of an electron beam to provide the elemental composition of analyzed volume.  The unique feature is that it can analyze up to 1 µm or less can be analyzed. The sample is shelled by the SEM’s electron beam, where electrons are ejected from these atoms comprising the sample’s surface. The result of the electron vacancies are filled by electrons from a higher state, and an x-ray is emitted to for the stability of energy difference between the electrons.

  • Silicon Drift detector
  • X-ray micro-tomography
  • Elemental mapping
  • Scanning electron microscopy
  • Transmission electron microscopy

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